Measurement HeadIM-7020

Model

IM-7020

Type

Head
模型采用背光/程序化 - 照明单元/灯探头单元

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

接收镜头

Double telecentric lens

Image
measurement

Field of view

Wide-field measurement mode: 200 mm × 200 mm7.87 × 7.87"(4x R50)
High-precision measurement mode: 125 × 125 mm4.92 × 4.92"

Minimum display unit

0.1 µm

Repetition accuracy

W / o阶段运动

Wide-field measurement mode: ±1 µm
High-precision measurement mode: ±0.5 µm

With stage movement

Wide-field measurement mode: ±2 µm
High-precision measurement mode: ±1.5 µm

测量精度（±2σ）

W/o binding

Wide-field measurement mode: ±5 µm^*1
High-precision measurement mode: ±2 µm^*2

With binding

Wide-field measurement mode: ± (7+0.02 L) µm^*3
High-precision measurement mode: ± (4+0.02L) µm^*4

Light probe
Measurement

Measurable area (XY)

90 × 90 mm3.54 × 3.54"

Maximum measurement depth

30 mm1.18"

光探针直径

ø3 mmø0.12"

Measuring force

0.015 N

Repeatability

±2 µm^*5

测量精度

± (8+0.02 L) µm^*6

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS

PhotoMos output
额定负载24 VDC 0.5 a
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 3.1.

4 ports (rear: 4)

USB 2.0系列A.

2 ports (front: 2)

记录

硬盘驱动器

500GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

四分，多角照明（电）
Slit ring (directivity) illumination (electric)

XY stage

Moving range

100 × 100 mm3.94 × 3.94"(electric)

Withstand load

5 kg

Z stage

Moving range

75 mm2.95"(electric)

Power supply

Power voltage

100 to 240 VAC 50/60 Hz

Power consumption

430 VA or lower

Environmental resistance

Pollution degree

2

Overvoltage category

II

Ambient temperature

+10 to +35 °C50 to 95 °F

相对湿度

20 to 80 % RH (No condensation)

Weight

Approx. 31 kg