3D Interference Measurement Sensor
WI-5000 series
Dedicated standWI-S1
Specifications
Model |
WI-S1 |
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XY stage moving range |
X axis: 75 mm2.95", Y axis: 50 mm1.97" |
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XY stage tilt angle |
±2° |
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Z stage moving range |
粗运动:64毫米2.52", fine movement: 2.0 mm0.08" |
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Dimensions(excluding moving parts) |
231 (W) x 408 (H) x 360 (D) mm9.09" (W) x 16.06" (H) x 14.17" (D) |
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Weight |
Approx. 10 kg |
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