Wide-Area 3D Measurement System HeadVR-3200

Model

VR-3200

Type

Head

Applicable controller

VR-3000K

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24.0毫米0.94"

垂直

18.0 mm0.71"

Magnification on a
15" monitor 25x

Horizontal

12.0 mm0.47“

垂直

9.0 mm0.35“

Magnification on a
15" monitor 38x

Horizontal

8.0 mm0.31"

垂直

6.0 mm0.24"

Magnification on a
15" monitor 50x

Horizontal

垂直

4.5 mm0.18"

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm0.30"

垂直

5.7 mm0.22"

Magnification on a
15" monitor 80x

Horizontal

3.8 mm0.15"

垂直

2.9 mm0.11“

Magnification on a
15" monitor 120x

Horizontal

2.5 mm0.10"

垂直

1.9 mm0.07"

Magnification on a
15" monitor 160x

Horizontal

垂直

1.4 mm0.06"

Zoom

1x to 4x

Measurable height

Wide-field mode：10 mm0.39"(±5 mm±0.20") High magnification mode：1 mm0.04"(±0.5 mm±0.02")^*1

Display resolution

0.1 µm^*2

Repeatability (σ)

Height measurement

0.5 µm^*3

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm^*3

Measurement
accuracy

Height measurement

±3 µm^*3

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm^*3

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement^*4
Auto adjustment, Auto template analysis^*4

Stage

XY stroke

184 × 88 mm7.24" x 3.46"(motorized)

Z stroke

90 mm3.54"(electric)

Rotation

±180°(sample rotating stage)

Tilt

±30° or more

Working distance

75 mm2.95"

Image receiving element

4 megapixel monochrome CMOS

发射机镜头

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)

Measurement light source

白色LED

Image size

1024 x 768 pixels, 2048 x 1536 pixels

数据处理

Dedicated PC specified by KEYENCE (OS: Windows 7)^*5

Rating

Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to +30 °C59到86°F

相对湿度

35 to 80 % RH (No condensation)

Weight

28.0 kg