Measurement Head: Wide-field modelIM-6125

Model

IM-6125

Type

Measurement head

Image sensor

1" 6.6 mega pixel CMOS

Display

10.4" LCD monitor (XGA: 1024 × 768)
External monitor connectable (clone output)

Receiver lens

Double telecentric lens

Image
measurement

Field of view

Wide field: ø100 × L200 mmø3.94" x 7.87", High precision: 25 × L125 mm0.98" × 4.92"

Minimum display unit

0.1 µm

Repetition accuracy

W / o阶段运动

Wide field: ±1µm High precision: ±0.5µm

With stage movement

Wide field: ±2µm High precision: ±1.5µm

Measurement accuracy (±2σ)

W/o binding

Wide field: ±5µm^*1High precision: ±2µm^*2

With binding

Wide field: ± (7 +0．02L)µm^*3High precision: ± (4 +0．02L)µm^*4

External remote input

No-voltage input (with contacts, without contacts)

External output

OK/NG/FAIL/MEAS

Relay outputRated load 24 VDC 0.5AON resistance 50 mΩ or less

Interface

LAN

RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

250 GB

Illumination system

Transparent

Telecentric transparent illumination (Green LED)

Ring

Four division ring illumination (White LED)

External

Externally connected illumination (coaxial)

X stage

Moving range

100 mm3.94"(electric)

Withstand load

2 kg

Z stage

Moving range

30 mm1.18"(electric)

Power supply

Power voltage

100 to 240 VAC 50 / 60 Hz

Power consumption

310 mA or less

Environmental resistance

Ambient temperature

+10 to +35 °C50 to 95 °F

相对湿度

20 to 80 % RH (No condensation)

Weight

Approx 31 kg